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| END | | END |
| </pre> | | </pre> |
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| '''CHMPOS [M1=(x1,y1){,M2=(x2,y2),M3=(x3,y3),M4=(x4,y4)}]'''
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| '''CHMPOS''' defines the chip alignment marks in the local chip coordinate system, unit is µm. M1 is mandatory while M2-M4 are optional in one mark mode. In four mark mode all marks must be defined. The order of the marks is important, M1 must be top left with M2-M4 placed clockwise around the center. In the given example the four marks are placed symmetrically at ±450 µm in x and ±450 µm in y.
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| It V1 mode it is customary to set M1 = (0,0) such that substrate height is detected at the center of the chip. In this way V1 mode can be used to exactly read out substrate height where the chip pattern will be written.
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