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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
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{|
{|
| [[Image:DRIE-Pegasus.jpg |frame|left|300px|The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}}]]
| [[file:DRIE-Pegasus.jpg |frame|left|300px|The DRIE-Pegasus 1 load lock and cassette loader in the DTU Nanolab cleanroom A-1. {{photo1}}]]
| [[Image:Pegasus 2 operator.jpg |frame|100px|The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1. {{photo1}}]]
| [[file:Pegasus 2 operator.jpg |frame|100px|The DRIE-Pegasus 2 operator station and load lock in the DTU Nanolab cleanroom A-1. {{photo1}}]]
| [[Image:Peg3and4 front 2.JPG |frame|300px|The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations. {{photo1}}]]
| [[file:Peg3and4 front 2.JPG |frame|300px|The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations. {{photo1}}]]
|-
|-
| align="center" | DRIE-Pegasus 1
| align="center" | DRIE-Pegasus 1
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