Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1: Difference between revisions
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[[Category: Equipment |Etch DRIE]] | [[Category: Equipment |Etch DRIE]] | ||
[[Category: Etch (Dry) Equipment|DRIE]] | [[Category: Etch (Dry) Equipment|DRIE]] | ||
{{Template:Author-jmli1}} | |||
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= DRIE-Pegasus 1= | = DRIE-Pegasus 1= | ||
[[Image:DRIE-Pegasus.jpg |frame|left|x300px|The DRIE-Pegasus 1 load lock and cassette loader in the Nanolab cleanroom A-1]] | [[Image:DRIE-Pegasus.jpg |frame|left|x300px|The DRIE-Pegasus 1 load lock and cassette loader in the Nanolab cleanroom A-1. {{photo1}} ]] | ||
'''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:''' | '''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:''' | ||