Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions

← Older edit Newer edit →

VisualWikitext

@@ Line 289: / Line 289: @@
 ; Bingdong Chang et al.: DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process
-: Microelectronic Engineering Volume 191, 5 May 2018, Pages 77-83
+: 2018 Microelectronic Engineering Volume 191, 5 May, Pages 77-83
 : https://doi.org/10.1016/j.mee.2018.01.034
-* Bingdong Chang et al.: DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro- and nanostructures by a modified Bosch etch process: https://doi.org/10.1088/1361-6439/aad0c4
-* Vy Thi Hoang Nguyen et al.: The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O2 Cycles with Excellent 3D Profile Control at Room Temperature: https://doi.org/10.1149/2162-8777/ab61ed
+; Bingdong Chang et al.: DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro- and nanostructures by a modified Bosch etch process
-* Bingdong Chang et al.: Large Area Three-Dimensional Photonic Crystal Membranes: Single-Run Fabrication and Applications with Embedded Planar Defects:
+:  2018 J. Micromech. Microeng. 28 105012
-https://doi.org/10.1002/adom.201801176
+: https://doi.org/10.1088/1361-6439/aad0c4
-* Chantal Silvestre et al.: Deep reactive ion etching of ‘grass-free’ widely-spaced periodic 2D arrays, using sacrificial structures: https://doi.org/10.1016/j.mee.2020.111228
+; Vy Thi Hoang Nguyen et al.: The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O2 Cycles with Excellent 3D Profile Control at Room Temperature
+: 2020 ECS J. Solid State Sci. Technol. 9 024002
+: https://doi.org/10.1149/2162-8777/ab61ed
+; Bingdong Chang et al.: Large Area Three-Dimensional Photonic Crystal Membranes: Single-Run Fabrication and Applications with Embedded Planar Defects
+: 2019, Advanced Optical Materials Volume 7, Issue 2, pp. 1801176
+: https://doi.org/10.1002/adom.201801176
+; Chantal Silvestre et al.: Deep reactive ion etching of ‘grass-free’ widely-spaced periodic 2D arrays, using sacrificial structures
+: 2020, Microelectronic Engineering, Volume 223, 15 February, 111228
+: https://doi.org/10.1016/j.mee.2020.111228
 *[[Media:Grassfree1.pdf | ]]