Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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It was professor [https://www.dtu.dk/service/telefonbog/person?id=103402&cpid=191195&tab=1 Henri Jansen] at DTU Nanolab who came up with the idea of adding the Picoscope to the Pegasi tools. Since then his group has researched a lot into its possibilities. Below is a list of publications in which the Picoscope plays a crucial role: | It was professor [https://www.dtu.dk/service/telefonbog/person?id=103402&cpid=191195&tab=1 Henri Jansen] at DTU Nanolab who came up with the idea of adding the Picoscope to the Pegasi tools. Since then his group has researched a lot into its possibilities. Below is a list of publications in which the Picoscope plays a crucial role: | ||
; Bingdong Chang et al.: DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process | |||
: Microelectronic Engineering Volume 191, 5 May 2018, Pages 77-83 | |||
: https://doi.org/10.1016/j.mee.2018.01.034 | |||
* Bingdong Chang et al.: DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro- and nanostructures by a modified Bosch etch process: https://doi.org/10.1088/1361-6439/aad0c4 | * Bingdong Chang et al.: DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro- and nanostructures by a modified Bosch etch process: https://doi.org/10.1088/1361-6439/aad0c4 | ||
* Vy Thi Hoang Nguyen et al.: The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O2 Cycles with Excellent 3D Profile Control at Room Temperature: https://doi.org/10.1149/2162-8777/ab61ed | * Vy Thi Hoang Nguyen et al.: The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O2 Cycles with Excellent 3D Profile Control at Room Temperature: https://doi.org/10.1149/2162-8777/ab61ed | ||