Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
| Line 385: | Line 385: | ||
LAYER 1 | LAYER 1 | ||
P(1) ' | P(1) 'thope230126.v30' | ||
SPPRM 4.0,,,,1.0,1 | SPPRM 4.0,,,,1.0,1 | ||
STDCUR 6 | STDCUR 6 | ||