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Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
2,001 edits
Line 566: Line 566:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
| Pneumatic
| Pneumatic
| 2
| ?
|-
|-


Line 585: Line 585:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
| Pneumatic
| Pneumatic
| 2
| ?
|-
|-


Line 602: Line 602:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
| Pneumatic
| Pneumatic
| 2
| ?
|-
|-


Line 622: Line 622:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
| Pneumatic
| Pneumatic
| 2
| ?
|-
|-


Line 633: Line 633:
| Optical
| Optical
|rowspan="2"| Quality
|rowspan="2"| Quality
|rowspan="2"| ? mJ/cm<sup>2</sup>
| ?
|rowspan="2"| ? µm
|rowspan="2"|  
|rowspan="2"|  
|
|rowspan="2"|
|rowspan="2"|
Priming: HMDS<br>
Priming: HMDS<br>
Rehydration after softbake: 1 hour (may not be necessary)<br>
Rehydration after softbake: 1 hour (may not be necessary)<br>
Line 644: Line 644:
|-style="background:whitesmoke; color:black"
|-style="background:whitesmoke; color:black"
| Pneumatic
| Pneumatic
|  
| ?
|-
|-


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