Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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In automatic mode the system will execute the SETWFR subprogram to find the global alignment marks (P and Q) by beam scans. SETWFR will execute mark detection at the P and Q mark locations defined in the JDF file. at their designated locations by beam scans as set up in the SETWFR subprogram. | In automatic mode the system will execute the SETWFR subprogram to find the global alignment marks (P and Q) by beam scans. SETWFR will execute mark detection at the P and Q mark locations defined in the JDF file. at their designated locations by beam scans as set up in the SETWFR subprogram. | ||
==Global alignment | ===Global alignment JDF=== | ||
<pre> | <pre> | ||
JOB/W 'ELELOP',4 | JOB/W 'ELELOP',4 | ||
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</pre> | </pre> | ||
==Chip alignment== | |||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | |||
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| [[image:EBLChipAlignExample.png|1000px]] | |||
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| colspan="1" style="text-align:center;| | |||
Illustration of chip alignment using a chip array instanced into another array. | |||
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===Chip alignment - SDF === | ===Chip alignment - SDF === | ||