Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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==Global alignment | ==Global alignment== | ||
The following files set up a single pattern for exposure with global alignment. To execute global alignment a few extra commands are used compared to the previous example. Only new commands are explained below. | The following files set up a single pattern for exposure with global alignment. To execute global alignment a few extra commands are used compared to the previous example. Only new commands are explained below. | ||
===Global alignment SDF=== | |||
<pre> | <pre> | ||
MAGAZIN 'THOPE' | MAGAZIN 'THOPE' | ||