Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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Compared to the first print exposure the SDF file has three extra commands, '''GLMDET''', '''CHIPAL''' and '''HSWITCH'''. | Compared to the first print exposure the SDF file has three extra commands, '''GLMDET''', '''CHIPAL''' and '''HSWITCH'''. Additionally, the '''OFFSET''' command serves a somewhat different purpose now as explained below. | ||
==Global alignment - JDF== | ==Global alignment - JDF== | ||