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Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,179 edits
Line 217: Line 217:
The JDF is terminated with a END command.
The JDF is terminated with a END command.


=Alignment exposure - direct exposure mode=
=Global alignment exposure - direct exposure mode=
Exposure with alignment
 
==Schedule file==
==Schedule file==


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