Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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If there is any uncertainty about the job executing correctly, always use the '''END''' command followed by the cassette used during the exposure. If execution of a sequence fails the software will consider the sequence as executed and move on to the next part of the SDF file. If this is an '''END''' command that changes to another cassette the cassettte will simply be exchanged without giving the user a chance to correct the error and try again. | If there is any uncertainty about the job executing correctly, always use the '''END''' command followed by the cassette used during the exposure. If execution of a sequence fails the software will consider the sequence as executed and move on to the next part of the SDF file. If this is an '''END''' command that changes to another cassette the cassettte will simply be exchanged without giving the user a chance to correct the error and try again. | ||
== | == Jobdeck File == | ||
One or more Jobdeck files (.jdf) is needed for an exposure. As a minimum the JDF file must contain information of what pattern to write and where to write it. It can also be used to specify alignment information. The filename is limited to 24 characters, no capital letters and no spaces. | One or more Jobdeck files (.jdf) is needed for an exposure. As a minimum the JDF file must contain information of what pattern to write and where to write it. It can also be used to specify alignment information. The filename is limited to 24 characters, no capital letters and no spaces. | ||
The JDF file has a common block and one or more layer blocks. The layer blocks can be used to define several patterns and several writing conditions in a single file. A simple example of a JDF with a single layer block is given below. | The JDF file has a common block and one or more layer blocks. The layer blocks can be used to define several patterns and several writing conditions in a single file. A simple example of a JDF with a single layer block is given below. | ||
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The JDF is terminated with a END command. | The JDF is terminated with a END command. | ||
=Alignment exposure - direct exposure mode= | =Alignment exposure - direct exposure mode= | ||