Specific Process Knowledge/Lithography/EBeamLithography/EBLsubstratePrep: Difference between revisions
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'''Samples with resist residues on the backside will also be rejected.''' If you have resist residues on the backside of your wafer you should wipe it off with an appropriate solvent. | '''Samples with resist residues on the backside will also be rejected.''' If you have resist residues on the backside of your wafer you should wipe it off with an appropriate solvent. | ||
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Example of rejected samples with visible bubbles in resist/Al coating and (a lot) of resist residue on the backside.. Photo: Thomas Pedersen. | |||
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