Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions
| Line 38: | Line 38: | ||
|} | |} | ||
=== Boundary box === | === Boundary box control === | ||
In continuation of the example above, if two layers/exposures are to be aligned to each other in subsequent process steps it is vital that the two layers boundary boxes are identical or at least symmetric around (0,0). With reference to the example below, the boundary boxes can be made identical by either | In continuation of the example above, if two layers/exposures are to be aligned to each other in subsequent process steps it is vital to control the extend of the boundary box, since that the two layers boundary boxes are identical or at least symmetric around (0,0). With reference to the example below, the boundary boxes can be made identical by either | ||
*Letting L2 inherit the L1 boundary box (option in Beamer) | *Letting L2 inherit the L1 boundary box (option in Beamer) | ||