Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation/Pathlist: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 1: | Line 1: | ||
=Path list= | |||
This is the full path list as available on the JEOL 9500 system. Please contact the EBL staff if you need a custom path defined on the tool. | This is the full path list as available on the JEOL 9500 system. Please contact the EBL staff if you need a custom path defined on the tool. | ||