Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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===SDF header section=== | ===SDF header section=== | ||
'''MAGAZIN | '''MAGAZIN {'name’}''' | ||
The SDF starts with specifying the name of the job. The name must be uppercase alphanumeric and limited to 9 characters. First character must be a letter. The name will appear in the exposure job list upon execution, but it is hardly important what it is. We recommend using your initials. In the example above the job will be named “MYWAFER”. | The SDF starts with specifying the name of the job. The name must be uppercase alphanumeric and limited to 9 characters. First character must be a letter. The name will appear in the exposure job list upon execution, but it is hardly important what it is. We recommend using your initials. In the example above the job will be named “MYWAFER”. | ||