Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
| Line 553: | Line 553: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!rowspan="2"| AZ MiR 701 | !rowspan="2"| AZ MiR 701 | ||
|rowspan="2"| | |rowspan="2"| 2023-04-17 <br> jehem | ||
|rowspan="2"| 1.5 µm | |rowspan="2"| 1.5 µm | ||
|rowspan="2"| 375 | |rowspan="2"| 375 | ||
| Optical | | Optical | ||
|rowspan="2"| Quality | |rowspan="2"| Quality | ||
|rowspan="2"| | |rowspan="2"| 385 mJ/cm<sup>2</sup> | ||
| | | 0 | ||
|rowspan="2"| | |rowspan="2"| 1 µm<br>Tested using dehydration reducing measures | ||
|rowspan="2"| | |rowspan="2"| | ||
PEB: 60s @ 110°C<br> | PEB: 60s @ 110°C<br> | ||
| Line 566: | Line 566: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
| Pneumatic | | Pneumatic | ||
| | | 2 | ||
|- | |- | ||
| Line 572: | Line 572: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!rowspan="2"| AZ nLOF 2020 | !rowspan="2"| AZ nLOF 2020 | ||
|rowspan="2"| | |rowspan="2"| 2023-04-17 <br> jehem | ||
|rowspan="2"| 2.0 µm | |rowspan="2"| 2.0 µm | ||
|rowspan="2"| 375 | |rowspan="2"| 375 | ||
| Optical | | Optical | ||
|rowspan="2"| Quality | |rowspan="2"| Quality | ||
|rowspan="2"| | |rowspan="2"| 550 mJ/cm<sup>2</sup> | ||
| | | 0 | ||
|rowspan="2"| | |rowspan="2"| 1.5 µm | ||
|rowspan="2"| | |rowspan="2"| | ||
PEB: 60s @ 110°C<br> | PEB: 60s @ 110°C<br> | ||
| Line 585: | Line 585: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
| Pneumatic | | Pneumatic | ||
| | | 2 | ||
|- | |- | ||
| Line 602: | Line 602: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
| Pneumatic | | Pneumatic | ||
| | | 2 | ||
|- | |- | ||
| Line 608: | Line 608: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!rowspan="2"| AZ 5214E<br>image reversal | !rowspan="2"| AZ 5214E<br>image reversal | ||
|rowspan="2"| | |rowspan="2"| 2023-04-17 <br> jehem | ||
|rowspan="2"| 2.2 µm | |rowspan="2"| 2.2 µm | ||
|rowspan="2"| 375 | |rowspan="2"| 375 | ||
| Optical | | Optical | ||
|rowspan="2"| Quality | |rowspan="2"| Quality | ||
|rowspan="2"| | |rowspan="2"| 35 mJ/cm<sup>2</sup> | ||
| | | 0 | ||
|rowspan="2"| | |rowspan="2"| 1.5 µm | ||
|rowspan="2"| | |rowspan="2"| | ||
Reversal bake: 60s @ 110°C<br> | Reversal bake: 60s @ 110°C<br> | ||
| Line 622: | Line 622: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
| Pneumatic | | Pneumatic | ||
| | | 2 | ||
|- | |- | ||