Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
| Line 723: | Line 723: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!AZ MiR 701 | !AZ MiR 701 | ||
| | | 2023-03-29<br>jehem | ||
| 1.5 µm | | 1.5 µm | ||
| 405 | | 405 | ||
| Line 729: | Line 729: | ||
| Quality | | Quality | ||
| 175 mJ/cm<sup>2</sup> | | 175 mJ/cm<sup>2</sup> | ||
| - | | -5 | ||
| 1 µm<br>Tested using dehydration reducing measures | | 1 µm<br>Tested using dehydration reducing measures | ||
| PEB: 60s@110°C<br>Dev: SP60s | | PEB: 60s@110°C<br>Dev: SP60s | ||
| Line 737: | Line 737: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!AZ nLOF 2020 | !AZ nLOF 2020 | ||
| 2023- | | 2023-03-29<br>jehem | ||
| 2.0 µm | | 2.0 µm | ||
| 405 | | 405 | ||
| Line 743: | Line 743: | ||
| Quality | | Quality | ||
| 9000 mJ/cm<sup>2</sup> | | 9000 mJ/cm<sup>2</sup> | ||
| | | -3 | ||
| 1 µm | | 1 µm | ||
| | | | ||
| Line 754: | Line 754: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!AZ 5214E | !AZ 5214E | ||
| 2023- | | 2023-03-29<br>jehem | ||
| 1.5 µm | | 1.5 µm | ||
| 405 | | 405 | ||
| Pneumatic | | Pneumatic | ||
| Quality | | Quality | ||
| | | 75 mJ/cm<sup>2</sup> | ||
| - | | -5 | ||
| 1 µm | | 1 µm | ||
| Dev: SP60s | | Dev: SP60s | ||
| Line 768: | Line 768: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!AZ 5214E<br>Image reversal | !AZ 5214E<br>Image reversal | ||
| 2023- | | 2023-03-29<br>jehem | ||
| 2.2 µm | | 2.2 µm | ||
| 405 | | 405 | ||
| Line 774: | Line 774: | ||
| Quality | | Quality | ||
| 50 mJ/cm<sup>2</sup> | | 50 mJ/cm<sup>2</sup> | ||
| - | | -5 | ||
| 1 µm | | 1 µm | ||
| | | | ||
| Line 785: | Line 785: | ||
|-style="background:whitesmoke; color:black" | |-style="background:whitesmoke; color:black" | ||
!AZ 4562 | !AZ 4562 | ||
| | | 2023-03-29<br>jehem | ||
| 10 µm | | 10 µm | ||
| 405 | | 405 | ||
| Line 791: | Line 791: | ||
| Quality | | Quality | ||
| 550 mJ/cm<sup>2</sup> | | 550 mJ/cm<sup>2</sup> | ||
| | | -2 | ||
| ≤5 µm | | ≤5 µm | ||
| | | | ||