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Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions

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Indiogo (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Indiogo (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers
462 edits
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*[[media:Report_Updated.pdf|Report_Annealsys_Updated_February23 by Inês Diogo@DTU Nanolab]]
*[[media:Report_Updated.pdf|Report_Annealsys_Updated_February23 by Inês Diogo@DTU Nanolab]]


*[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=5&name=Dissertation_ID_Rapid_Thermal_Processing_and_its_Effects_on_High_Aspect_Ratio_Silicon_Features.pdf Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features_October22 by Inês Diogo@DTU Nanolab] - requires login
*[http://hdl.handle.net/10362/152031 Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features_October22 by Inês Diogo@DTU Nanolab]


'''''Important!''''' The '''''RTO sequences''''' that were developed during the previous experimental work on the RTP Annealsys are '''''not available to users'''''. More tests and further investigation are required to prevent damaging the tool.
'''''Important!''''' The '''''RTO sequences''''' that were developed during the previous experimental work on the RTP Annealsys are '''''not available to users'''''. More tests and further investigation are required to prevent damaging the tool.
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