LabAdviser/Courses/TPT Dry Etch: Difference between revisions

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The Dry Etch TPT

DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via training@nanolab.dtu.dk.

The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

Course Description

Online lecture videos (theory, ~3h)
Quizzes for each section
Online training videos (equipment operation, ~1/2h)
Group hands-on training (~2h)
Individual hands-on training (specific equipment)

The individual hands-on training can be requested via training@nanolab.dtu.dk.

Learning objectives

Learn about the fundamentals of plasma dry etch processing in a cleanroom fabrication lab:

Generation and Characteristics of the Etch Plasma
Introduction to dry etch process
Tuning of the dry etch process
Overview of the dry etch equipment at Nanolab

After the course you will be able to

Know why and when to use dry etching
Use the dry etchers without harming the machines
Select the right instrument to use for his/her dry etch processing
Select an appropriate etch recipe for his/her dry etch processing
Spot when the recipe needs to be tuned for his/her needs and
Suggest relevant tuning parameters

Qualified Prerequisites

Cleanroom safety course at DTU Nanolab
Admission to the cleanroom must be obtained before the group training session

Course Responsible

The Dry Etch Group at DTU Nanolab

Jonas Michael-Lindhard
Berit Herstrøm

If you have questions you can contact us by e-mailing dryetch@nanolab.dtu.dk.

Material for preparations and further information (You will also find this in the course material inside DTU Learn)

Literature

No extra Literature at the moment

Slides from Lecture

Lecture slides with explanatory text included [1], requires login

Lecture videos
(Watch before the question and evaluation session)

The 9 lecture videos can be found on YouTube here: Lecture videos

Pre hands-on training videos
(Watch before the hands-on training)

The 13 pre hands-on training vidoes can be found on You Tube here:Pre hands-on training videos

@@ Line 3: / Line 3: @@
 ==The Dry Etch TPT  ==
-DTU Nanolab offers a Tool Package Training in dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.
+DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would  like to use via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].
-The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.
+The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here].
+'''Course Description'''
-{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
+# Online lecture videos (theory, ~3h)
-|-
+# Quizzes for each section
+# Online training videos (equipment operation, ~1/2h)
+# Group hands-on training (~2h)
+# Individual hands-on training (specific equipment)
-|-
+''The individual hands-on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''
-|-style="background:White; color:black; text-align:center"
-!colspan="2"|Dry Etch Tool Package Training
-|-
-!Signing up for the course - Course material
-|
-The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Dry Etch".
-*Log into DTU Learn here: [https://learn.inside.dtu.dk DTU Learn]
-*Select the menu "Discover"
-*Search for "Nanolab"
-Select the course "DTU Nanolab TPT:Dry Etch"
-*Press "Enroll in Course"
-*You have now signed up for the course.
-*Go to the course page in DTU Learn and choose "Course Content" and "Content"
-*You have to read it all and go through all the material in the Dry Etch TPT.
-|-
-<!--
-|-
-!Schedule
-|
-'''Theoretical part'''
-* A 3-hour lecture. The lecture is on videos. the videos can be found on YouTube, see link below. You can also find the slides with notes below. It can be helpful to print out the lecture slide for your notes and questions while watching the videos. After seeing the videos you need to go though a quiz (assignment). You will get a link to the quiz when signing up for the Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: [https://doodle.com/poll/awkny9e952arxbxm Dry Etch TPT Lecture doodle]. The Question&Evaluation session takes place in room: 347-078 normally. At the moment we can do the Question&Evaluation session online.
-'''Practical part'''
+'''Learning objectives'''
-* A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session. Before this you need to watch the "Pre hands-on training videos"
-|-
+Learn about the fundamentals of plasma dry etch processing in a cleanroom fabrication lab:
-|-
+* Generation and Characteristics of the Etch Plasma
-!Location
+* Introduction to dry etch process
-|
+* Tuning of the dry etch process
-'''Theoretical part  (the question&evaluation session)'''
+* Overview of the dry etch equipment at Nanolab
-* Room: 347-R078 (or Zoom)
-'''Practical part'''
+After the course you will be able to
-* The training session takes place inside the cleanroom. The meeting point will be in The gowning area.
+* Know why and when to use dry etching
-|-
+* Use the dry etchers without harming the machines
+* Select the right instrument to use for his/her dry etch processing
+* Select an appropriate etch recipe for his/her dry etch processing
+* Spot when the recipe needs to be tuned for his/her needs and
+* Suggest relevant tuning parameters
+'''Qualified Prerequisites'''
-|-
-!Qualified Prerequisites
-|
 * Cleanroom safety course at DTU Nanolab
-* Admission to the cleanroom must be obtained before the training session
+* Admission to the cleanroom must be obtained before the group training session
-|-
-|-
-!Preparations
-|
-'''Before the Question&Evaluation session'''
-*Watch the lecture videos, see link to the videos below. And go though the quiz (assignment).
-*If you are not familiar with dry etching we advice you to read through the "Lecture slides with explanatory text included" [[:File:TPT Dry etching April2018 with notes.pdf]] before or after watching the videos and during answering the quiz.
-'''Before training session'''
+'''Course Responsible'''
-* Watch the training video: TPT hands-on intro
-* Watch the screen cast video's for the ASE/AOE software
-* Watch the screen cast video's for the DRIE/ICP metal and III-V ICP<br>
-These are on YouTube and you can find a link to the videos below
-|-
-|-
+''The Dry Etch Group at DTU Nanolab''
-!Course Responsible
-|
-'''The Dry Etch Group at DTU Nanolab'''
 *Jonas Michael-Lindhard
 *Berit Herstrøm
 If you have questions you can contact us by e-mailing [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk].
-|-
--->
-|-
-!Learning Objectives
-|
-*Know why and when to use dry etching
-*Use the dry etchers without harming the machines
-*Select the right instrument to use for his/her dry etch processing
-*Select an appropriate etch recipe for his/her dry etch processing
-*Spot when the recipe needs to be tuned for his/her needs and
-*Suggest relevant tuning parameters
-|-
-|}
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