Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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High quality mode is used for minimum stitching effects.<br> | High quality mode is used for minimum stitching effects.<br> | ||
In the high quality mode, an area of the pattern is exposed by 5 stripes, each | In the high quality mode, an area of the pattern is exposed by 5 stripes, each 500 µm wide and exposing a fifth of the dose. At the same time, sub-pixel interpolation is applied, giving an address grid size of 100 nm. | ||
'''Fast:''' | '''Fast:''' | ||