Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions
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==Back Side Alignment== | ==Back Side Alignment== | ||
'''Overlay accuracy (spec):''' 1.0 µm | |||
''' | '''BSA windows:''' along the X and Y axes, 10mm x 46mm, starting 14.5 mm from the center. | ||
''' | '''Camera field of view (W x H):''' 640 µm x 480 µm | ||
[[Image:MLA150_BSA_Backside.JPG|center|300px|thumb|Image of a BSA alignment mark during alignment. The mark is 300µm wide. The blue cross-hair is ~18µm. Screenshot by Thomas Anhøj @ DTU Nanolab, 2019.]] | |||
The alignment marks must be placed within the BSA windows. The Overview camera only shows the top side of the substrate, and cannot be used to locate the BSA marks. | The alignment marks must be placed within the BSA windows. The Overview camera only shows the top side of the substrate, and cannot be used to locate the BSA marks. | ||
{| cellpadding="2" style="border: 2px solid darkgray;" align=" | {| cellpadding="2" style="border: 2px solid darkgray;" align="center" | ||
! width="320" | | ! width="320" | | ||
! width="320" | | ! width="320" | | ||
! width="320" | | ! width="320" | | ||
|+'''Substrate view during backside alignment. Screenshots by Thomas Anhøj @ DTU Nanolab, 2019.''' | |+'''Substrate view during backside alignment. Screenshots by Thomas Anhøj @ DTU Nanolab, 2019.''' | ||