Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
No edit summary |
|||
| Line 39: | Line 39: | ||
|- | |- | ||
!style="background:Silver; color:black" align="center" align="center" rowspan="2"|Temperature | !style="background:Silver; color:black" align="center" align="center" rowspan="2"|Temperature | ||
|style="background:Silver; color:black"| | |style="background:Silver; color:black"|Pyro Control | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
* up to 1200 <sup>o</sup>C | * up to 1200 <sup>o</sup>C | ||