Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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*[[media:Report_Updated.pdf|Report_Annealsys_Updated_February23 by Inês Diogo@DTU Nanolab]] | *[[media:Report_Updated.pdf|Report_Annealsys_Updated_February23 by Inês Diogo@DTU Nanolab]] | ||
*[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=5&name= | *[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=5&name=Dissertation_ID_Rapid_Thermal_Processing_and_its_Effects_on_High_Aspect_Ratio_Silicon_Features.pdf| Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features_October22 by Inês Diogo@DTU Nanolab] - requires login | ||
'''''Important!''''' The '''''RTO sequences''''' that were developed during the previous experimental work on the RTP Annealsys are '''''not available to users'''''. More tests and further investigation are required to prevent damaging the tool. | '''''Important!''''' The '''''RTO sequences''''' that were developed during the previous experimental work on the RTP Annealsys are '''''not available to users'''''. More tests and further investigation are required to prevent damaging the tool. | ||
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process/RTP_Annealsys click here]''' | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process/RTP_Annealsys click here]''' | ||