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Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions

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Indiogo (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Indiogo (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers
462 edits
Line 50: Line 50:
|style="background:Silver; color:black"|Ar
|style="background:Silver; color:black"|Ar
|style="background:LightGrey; color:black"|
|style="background:LightGrey; color:black"|
*up to 2000 SCCM
*Max. 2000 SCCM
|style="background:WhiteSmoke; color:black;" align="center"|
|style="background:WhiteSmoke; color:black;" align="center"|
|-
|-
|style="background:Silver; color:black"|O<sub>2
|style="background:Silver; color:black"|O<sub>2
|style="background:LightGrey; color:black"|
|style="background:LightGrey; color:black"|
*up to 2000 SCCM
*Max. 2000 SCCM
|style="background:WhiteSmoke; color:black;" align="left"|'''Not allowed''' for users.
|style="background:WhiteSmoke; color:black;" align="left"|'''Not allowed''' for users.
|-
|-
|style="background:Silver; color:black"|NH<sub>3
|style="background:Silver; color:black"|NH<sub>3
|style="background:LightGrey; color:black"|
|style="background:LightGrey; color:black"|
*up to 2000 SCCM
*Max. 2000 SCCM
|style="background:WhiteSmoke; color:black;" align="left"|'''Not allowed''' for users.
|style="background:WhiteSmoke; color:black;" align="left"|'''Not allowed''' for users.
|-
|-
|style="background:Silver; color:black"|5% H<sub>2</sub>/Ar
|style="background:Silver; color:black"|5% H<sub>2</sub>/Ar
|style="background:LightGrey; color:black"|
|style="background:LightGrey; color:black"|
*up to 2000 SCCM
*Max. 2000 SCCM
|style="background:WhiteSmoke; color:black;" align="center"|
|style="background:WhiteSmoke; color:black;" align="center"|
|-
|-
Line 76: Line 76:
|style="background:Silver; color:black"|Controller
|style="background:Silver; color:black"|Controller
|style="background:LightGrey; color:black"|
|style="background:LightGrey; color:black"|
*up to 13.3(3) mbar
*Max. 13.3(3) mbar
|style="background:WhiteSmoke; color:black;" align="center"|
|style="background:WhiteSmoke; color:black;" align="center"|
|-
|-
Line 82: Line 82:
|style="background:Silver; color:black"|At 1200 <sup>o</sup>C
|style="background:Silver; color:black"|At 1200 <sup>o</sup>C
|style="background:LightGrey; color:black"|
|style="background:LightGrey; color:black"|
*Up to 10 min
*Max. 10 min
|style="background:WhiteSmoke; color:black;" align="center"|
|style="background:WhiteSmoke; color:black;" align="center"|
|-
|-
|style="background:Silver; color:black"|At 1100 <sup>o</sup>C
|style="background:Silver; color:black"|At 1100 <sup>o</sup>C
|style="background:LightGrey; color:black"|
|style="background:LightGrey; color:black"|
*Up to 30 min
*Max. 30 min
|style="background:WhiteSmoke; color:black;" align="left"|
|style="background:WhiteSmoke; color:black;" align="left"|
|-
|-
|style="background:Silver; color:black"|At 1000 <sup>o</sup>C
|style="background:Silver; color:black"|At 1000 <sup>o</sup>C
|style="background:LightGrey; color:black"|
|style="background:LightGrey; color:black"|
*Up to 60 min
*Max. 60 min
|style="background:WhiteSmoke; color:black;" align="left"|
|style="background:WhiteSmoke; color:black;" align="left"|
|-  
|-  
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