Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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!style="background:Silver; color:black" align="center" align="center" rowspan="3"|Process time | !style="background:Silver; color:black" align="center" align="center" rowspan="3"|Process time | ||
|style="background:Silver; color:black"|1200 <sup>o</sup>C | |style="background:Silver; color:black"|At 1200 <sup>o</sup>C | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
*Up to 10 min | *Up to 10 min | ||
|style="background:WhiteSmoke; color:black;" align="center"| | |style="background:WhiteSmoke; color:black;" align="center"| | ||
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|style="background:Silver; color:black"|1100 <sup>o</sup>C | |style="background:Silver; color:black"|At 1100 <sup>o</sup>C | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
*Up to 30 min | *Up to 30 min | ||
|style="background:WhiteSmoke; color:black;" align="left"| | |style="background:WhiteSmoke; color:black;" align="left"| | ||
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|style="background:Silver; color:black"|1000 | |style="background:Silver; color:black"|At 1000 <sup>o</sup>C | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
*Up to 60 min | *Up to 60 min | ||