Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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|style="background:Silver; color:black"| | |style="background:Silver; color:black"|1200 <sup>o</sup>C | ||
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* | *Up to 10 min | ||
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|style="background:Silver; color:black"|1100 <sup>o</sup>C | |||
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*Up to 30 min | |||
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|style="background:Silver; color:black"|1000 | |||
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*Up to 60 min | |||
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!style="background:Silver; color:black" align="center" align="center" rowspan="1"|Heating rate | !style="background:Silver; color:black" align="center" align="center" rowspan="1"|Heating rate | ||
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