Specific Process Knowledge/Lithography/EBeamLithography/JEOL 9500 User Guide: Difference between revisions
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=Cassette transfer= | |||
Cassette transfer is controlled from the '''Loader''' program. If it is not open it can be opened from the '''EBX Menu''' by clicking '''Ldr.''' | |||
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All essential programs can be started from the EBX Menu. | |||
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The Loader window controls cassette exchange between the writing system and the cassette transfer system. | |||
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The '''Loader''' window shows available cassettes in the automatic transfer system and which cassette is currently inside the writing system. In this example cassette 10 is inside the writing system. Cassettes can be moved between the writing system and the transfer system with the '''Carry in''' and '''Carry out''' buttons. '''Carry in''' will move the selected cassette to the writing system while '''Carry out''' will move the selected cassette to the selected shelf in the transfer system. In order to move a particular cassette into the writing system the current cassette must naturally be moved out first. | |||
The '''EXCH EVAC''' switch must always be left unchecked as in this example. If it is toggled on the exchange chamber (load lock) will be pumped down after a carry out operation and the next carry in operation must then wait for the pump down (15 min) before it can be executed. Always leave '''EXCH EVAC''' off. | |||
Prior to exposure the chosen cassette has to be transferred from the cassette transfer system and to the main chamber. This is done from the “Loader” module by first moving out the current cassette from the main chamber and then moving in the cassette used for exposure. Carry out takes about 4 minutes while carry in takes about 15 min since the exchange chamber has to pump down to vacuum. The procedure is | |||
*Make sure '''EXCH EVAC''' is toggled off | |||
*Press '''Carry out''' to move the current cassette back to the shelf it was loaded from | |||
*After about 4 min the status light will be solid green, select the cassette to use | |||
*Press '''Carry in''' | |||
*The system will be ready after about 15 min | |||