Specific Process Knowledge/Lithography/EBeamLithography/JEOL 9500 User Guide: Difference between revisions
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== Authorization == | == Authorization == | ||
*Only authorized users are allowed to use this machine | *Only authorized users are allowed to use this machine. | ||
*In E-2, all users must keep within the area between the front side of the machine and the table with the pre-aligner setup. Only JEOL staff or DTU Nanolab staff may access the backside of the machine. | *In E-2, all users must keep within the area between the front side of the machine and the table with the pre-aligner setup. Only JEOL staff or DTU Nanolab staff may access the backside of the machine. | ||
*No users, not even authorised users, are allowed to load a substrate into the | *No users, not even authorised users, are allowed to load a substrate into the automatic cassette transfer system. | ||
*After your exposure, fully trained users can unload their cassettes from the | *After your exposure, fully trained users can unload their cassettes from the automatic cassette transfer system and unmount their substrates. | ||
*If you are | *If you are unable to unmount your substrates before another user requires the cassette, you must accept that either the next user or DTU Nanolab personel unmount your substrates. | ||
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