Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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The END command serves two purposes. First of all it tells the software that this is the end of the job. Secondly, the number after the END command determines which cassette to load from the autoloader to the stage after job execution. In the example a pattern is written on cassette 8 and since the END command also ends with 8, no cassette change is made. If it had terminated with '''END 1''', cassette 8 would be transferred out and cassette 1 would be transferred in after pattern writing. If the job terminates with an END command without a number, the current cassette will be unloaded and the stage left empty. This is not allowed since the stage will loose position tracking after extended time without a cassette on stage. Always either leave the current cassette on stage or transfer another cassette. | The END command serves two purposes. First of all it tells the software that this is the end of the job. Secondly, the number after the END command determines which cassette to load from the autoloader to the stage after job execution. In the example a pattern is written on cassette 8 and since the END command also ends with 8, no cassette change is made. If it had terminated with '''END 1''', cassette 8 would be transferred out and cassette 1 would be transferred in after pattern writing. If the job terminates with an END command without a number, the current cassette will be unloaded and the stage left empty. This is not allowed since the stage will loose position tracking after extended time without a cassette on stage. Always either leave the current cassette on stage or transfer another cassette. | ||
If there is any uncertainty about the job executing correctly, always use the '''END''' command followed by the cassette used during the exposure. If execution of a sequence fails for some reason the software will consider the sequence as executed and move on to the next part of the SDF file. If this is an '''END''' command that changes to another cassette the cassettte will simply be exchanged without giving the user a chance to correct the error and try again. | |||
== Job Deck File – no alignment == | == Job Deck File – no alignment == | ||