Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions
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== Schedule File - no alignment == | == Schedule File - no alignment == | ||
A simple example of a SDF is shown below. It has a single sequence and hence it will expose a single substrate. A detailed description of the commands is given below. Comments can be added using | A simple example of a SDF is shown below. It has a single sequence and hence it will expose a single substrate. A detailed description of the commands is given below. Comments can be added using semicolon, as illustrated in the first line. | ||
<pre> | <pre> | ||