Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions
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== Export to V30 == | == Export to V30 == | ||
As a final step to pattern preparation it must be exported to the V30 format. This is done by connecting a '''Export''' node to the flow. In the first window that opens make sure to choose V30 as the file format. | |||
The '''Export''' node itself has quite a few options. The most import is the '''Machine Type''' field which defaults to an incorrect machine. Make sure to choose '''JBX-9500FS (100kV)'''. In most cases all other options can be left at their default values. There can however be good reasons to control the fracturing and field ordering found in the '''Advanced''' tab. For information on these please check the respective sections of our [[Specific_Process_Knowledge/Lithography/EBeamLithography/BEAMER|Beamer guide.]] | |||
In addition to the V30 file a .JDI file is also generated. This contains the corresponding dose modulation table. If the design is not proximity corrected the table will be empty and is not needed. If the design is proximity corrected it is necesarry to open the JDI file and copy-paste the modulation table into the JDF file used for the exposure. | |||
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! width=100% | Example JDI file after PEC | |||
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<pre> | |||
MOD001: MODULAT (( 0, -24.3 ) , ( 1, -23.6 ) , ( 2, -22.8 ) | |||
- , ( 3, -22.0 ) , ( 4, -21.2 ) , ( 5, -20.5 ) | |||
- , ( 6, -19.7 ) , ( 7, -18.9 ) , ( 8, -18.0 ) | |||
- , ( 9, -17.2 ) , ( 10, -16.4 ) , ( 11, -15.6 ) | |||
- , ( 12, -14.7 ) , ( 13, -13.9 ) , ( 14, -13.0 ) | |||
- , ( 15, -12.1 ) , ( 16, -11.3 ) , ( 17, -10.4 ) | |||
- , ( 18, -9.5 ) , ( 19, -8.6 ) , ( 20, -7.7 ) | |||
- , ( 21, -6.7 ) , ( 22, -5.8 ) , ( 23, -4.8 ) | |||
- , ( 24, -3.9 ) , ( 25, -2.9 ) , ( 26, -2.0 ) | |||
- , ( 27, -1.0 ) , ( 28, 0.0 ) , ( 29, 1.0 ) | |||
- , ( 30, 2.0 ) , ( 31, 3.0 ) , ( 32, 4.1 ) | |||
- , ( 33, 5.1 ) , ( 34, 6.2 ) , ( 35, 7.2 ) | |||
- , ( 36, 8.3 ) , ( 37, 9.4 ) , ( 38, 10.5 ) | |||
- , ( 39, 11.6 ) , ( 40, 12.7 ) , ( 41, 13.8 ) | |||
- , ( 42, 14.9 ) , ( 43, 16.1 ) , ( 44, 17.3 ) | |||
- , ( 45, 18.4 ) , ( 46, 19.6 ) , ( 47, 20.8 ) | |||
- , ( 48, 22.0 ) , ( 49, 23.2 ) , ( 50, 24.5 ) | |||
- , ( 51, 25.7 ) , ( 52, 27.0 ) , ( 53, 28.2 ) | |||
- , ( 54, 29.5 ) , ( 55, 30.8 ) , ( 56, 32.1 ) | |||
- , ( 57, 33.5 ) , ( 58, 34.8 ) , ( 59, 36.1 ) | |||
- , ( 60, 37.5 ) , ( 61, 38.9 ) , ( 62, 40.3 ) | |||
- , ( 63, 41.7 ) , ( 64, 43.1 ) , ( 65, 44.5 ) | |||
- , ( 66, 46.0 ) , ( 67, 47.4 ) , ( 68, 48.9 ) | |||
- , ( 69, 50.4 )) | |||
; SCAN_STEP = 0.001000 | |||
; MINIMAL_RESOLUTION = 0.000250 | |||
; MACHINE_TYPE = JBX-9500FS (100kV) | |||
; DIGITAL_SCALING_X = 1.000000 | |||
; DIGITAL_SCALING_Y = 1.000000 | |||
; MAXIMUM_BEAMSIZE = 16000 | |||
; SHOT_SHIFT_COUNT = 1 | |||
; OVERLAP_COUNT = 1 | |||
; INCREMENT_SCANNER_DATA_UNIT = 1 | |||
; SUBFIELD_SORTING_DIRECTION = YZIG | |||
; PATTERN_SORTING_DIRECTION = XZIG | |||
; PATTERN_WRITING_UNIT_TYPE = POSSET | |||
end<> | |||
</pre> | |||
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