Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
| Line 23: | Line 23: | ||
== Coordinate system == | == Coordinate system == | ||
When placing a substrate in a cassette it is essential to know the relation between the cassette coordinate system and the design coordinate system. On wafer cassettes this is very obvious as they have a flat pin where the flat of the wafer will sit. On chip cassettes the substrate can however be placed at any rotation and hence the exposed pattern can end up upside down if one does not pay attention to this. | When placing a substrate in a cassette it is essential to know the relation between the cassette coordinate system and the design coordinate system. On wafer cassettes this is very obvious as they have a flat pin where the flat of the wafer will sit. On chip cassettes the substrate can however be placed at any rotation and hence the exposed pattern can end up upside down if one does not pay attention to this. The pattern coordinate system x' and y' is illustrated below. Notice that the is when the cassette is viewed from the front side with the hook placed to the right. | ||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | ||