Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow etch: Difference between revisions
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==Etch Profile SEM images== | ==Etch Profile SEM images== | ||
<gallery caption="Profile of etch for 'Slow Etch2' 12 min, 100mm wafer on 150mm carrier with double side polyimide tape (capton)" widths="300px done by bghe, DTU Nanolab" heights="300px" widths="400px" perrow="3"> | <gallery caption="Profile of etch for 'Slow Etch2' 12 min, 100mm wafer on 150mm carrier with double side polyimide tape (capton), Si3N4 from LPCVD" widths="300px done by bghe, DTU Nanolab" heights="300px" widths="400px" perrow="3"> | ||
File:C08507_01.jpg | File:C08507_01.jpg | ||
File:C08507_02.jpg | File:C08507_02.jpg | ||