Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow etch: Difference between revisions
| Line 82: | Line 82: | ||
==Etch Profile SEM images== | ==Etch Profile SEM images== | ||
<gallery caption="Profile of etch for 'Slow Etch2' 12 min" widths="300px done by bghe, DTU Nanolab" heights="300px" widths="400px" perrow="3"> | <gallery caption="Profile of etch for 'Slow Etch2' 12 min, 4" wafer on 6" carrier with double side poly imide tape (capton)" widths="300px done by bghe, DTU Nanolab" heights="300px" widths="400px" perrow="3"> | ||
File:C08507_01.jpg | File:C08507_01.jpg | ||
File:C08507_02.jpg | File:C08507_02.jpg | ||