Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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=Beamer guide= | =Beamer guide= | ||
All users of the JEOL 9500 system must have their pattern converted to the JEOL52 V3.0 (V30) format, this conversion is done using Beamer. Beamer can however do many other operations than this simple format conversion. In this section we will | All users of the JEOL 9500 system must have their pattern converted to the JEOL52 V3.0 (V30) format, this conversion is done using Beamer. Beamer can however do many other operations than this simple format conversion. In this section we will describe some of the most frequently used nodes and also provide a few node setups for specialized tasks. | ||
==Node descriptions== | |||
{| class="wikitable" | {| class="wikitable" | ||
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| Example || Example | | Example || Example | ||
|} | |} | ||
==Node setups== | |||
= Proximity Effect Correction = | = Proximity Effect Correction = | ||