Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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=Beamer guide= | =Beamer guide= | ||
All users of the JEOL 9500 system must have their pattern converted to the JEOL52 V3.0 (V30) format. This is typically done using Beamer. Beamer can however do many other operations than a simple format conversion. In this section we will dive into some of the most useful functions of Beamer as listed below. | All users of the JEOL 9500 system must have their pattern converted to the JEOL52 V3.0 (V30) format. This is typically done using Beamer. Beamer can however do many other operations than a simple format conversion. In this section we will dive into some of the most useful functions of Beamer as listed below. | ||
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|+ Important Beamer modules and methods | |||
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! Module/method !! Short description | |||
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| PEC || Used to apply Proximity Effect Correction to a pattern | |||
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| Example || Example | |||
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| Example || Example | |||
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= Proximity Effect Correction = | = Proximity Effect Correction = | ||