Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
| Line 182: | Line 182: | ||
=Dose test with Chipplace= | =Dose test with Chipplace= | ||
A pattern can easily be set up for a dose test using the Chipplace module. In Chipplace one can set up a pattern to be instanced a number of time and easily assign each instance a dose. The dose can be manually set or be linearly interpolated between a start and end value for the instanced array. The output of Chipplace is a single pattern file with all array elements assigned to individual doses (shot ranks). This also works with patterns that already have PEC applied. In that case Chipplace will create a combined modulation of the PEC modulation and the dose test modulation. In the example below we demonstrate how to set up dose test without PEC. If PEC is needed a PEC node can simply be added before the Chipplace node. | A pattern can easily be set up for a dose test using the Chipplace module. In Chipplace one can set up a pattern to be instanced a number of time and easily assign each instance a dose. The dose can be manually set or be linearly interpolated between a start and end value for the instanced array. The output of Chipplace is a single pattern file with all array elements assigned to individual doses (shot ranks). This also works with patterns that already have PEC applied. In that case Chipplace will create a combined modulation of the PEC modulation and the dose test modulation. In the example below we demonstrate how to set up dose test without PEC. If PEC is needed a PEC node can simply be added before the Chipplace node. In the example we will use the '''Array_dots''' pattern found in the examples pane. It is simply an array of dots in a 100 x 100 µm<sup>2</sup> box. The procedure is | ||
*Import a design | |||
*Add the Chipplace node | |||
*In the '''Substrate''' tab define the substrate size. This is purely for visualization of how the pattern fits on the substrate | |||
Work in progress. THOPE 2023-02-24 | Work in progress. THOPE 2023-02-24 | ||