Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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*Open '''ACHK''' from the '''Analysis''' pane | *Open '''ACHK''' from the '''Analysis''' pane | ||
*Click “File” -> “Open” and open your magazine file | *Click “File” -> “Open” and open your magazine file | ||
*The pattern placement is now shown. Zoom into the pattern by left click and drag a box to zoom on | |||
*Click an instance of the pattern, it changes color to red | |||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | ||
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| [[image:9500achk1.png|500px]] || [[image: | | [[image:9500achk1.png|500px]] || [[image:9500achk3.png|500px]] | ||
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| colspan="2" style="text-align: center;| | | colspan="2" style="text-align: center;| | ||