Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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[[File:cpr + iso x3 meas.png|400px|left|thumb|'''''x3 anisotropic + isotropic etch.<br> | [[File:cpr + iso x3 meas.png|400px|left|thumb|'''''x3 anisotropic + isotropic etch.<br> | ||
Photo: Maria Farinha @DTU Nanolab, June 2022''''']] | Photo: Maria Farinha @DTU Nanolab, June 2022''''']] | ||
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= DREM 0.2kW = | = DREM 0.2kW = | ||