Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
| Line 244: | Line 244: | ||
<br clear="all" /> | <br clear="all" /> | ||
<val> | |||
<prop att="deliveryTarget" action="exclude"/> | |||
<prop att="deliveryTarget" val="olh" action="include"/> | |||
</val> | |||
= DREM 0.2kW = | = DREM 0.2kW = | ||