Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
| Line 527: | Line 527: | ||
Use the '''Pattern writing execution check''' window to verify the cassette number and estimated execution time. Image: Thomas Pedersen. | Use the '''Pattern writing execution check''' window to verify the cassette number and estimated execution time. Image: Thomas Pedersen. | ||
|} | |} | ||
The system will now carry out initial and cyclic calibration as defined by the path in the JDF file and then exposure will start. The pattern writing can be observed in the SSP window (top left) once it starts. Progress can be monitored in the '''Expose''' window which will give a percentage completion and completion time for the current sequence. Once exposure is completed the system will confirm this with the '''Pattern writing completed''' window. | |||
=Development= | =Development= | ||