Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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*Click '''Execute''' in the '''RESTOR''' window | *Click '''Execute''' in the '''RESTOR''' window | ||
The bottom line of the '''Calibration''' window will now display 'Received an intermediate result RESTOR(DEMAG)' to indicate it is working. Setting up for the new condition file takes about 1 minute and the bottom line will say 'Finished' when done and the system is ready to move on. | The bottom line of the '''Calibration''' window will now display ''Received an intermediate result RESTOR(DEMAG)'' to indicate it is working. Setting up for the new condition file takes about 1 minute and the bottom line will say 'Finished' when done and the system is ready to move on. | ||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | ||