Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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! Substrate size !! ID !! Slot ID !! Material !! Image | ! Substrate size !! ID !! Slot ID !! Material !! Image | ||
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| Chips || BM4P-509 || 3A, 3B, 3C, 3D || Ti || | | Chips || BM4P-509 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-509_cas.png|800px]] | ||
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| Chips || BM4P-510 || 3A, 3B, 3C, 3D || Ti || | | Chips || BM4P-510 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-510_cas.png|800px]] | ||
|- | |- | ||
| 2" || BM6P-006 || 2A, 2B, 2C, 2D, 2E, 2F || Al || [[image:BM6P-006_cas.png|800px]] | | 2" || BM6P-006 || 2A, 2B, 2C, 2D, 2E, 2F || Al || [[image:BM6P-006_cas.png|800px]] | ||