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Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions

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! Substrate size !! ID !! Slot ID !! Material !! Image
! Substrate size !! ID !! Slot ID !! Material !! Image
|-
|-
| Chips || BM4P-509 || 3A, 3B, 3C, 3D || Ti || Image
| Chips || BM4P-509 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-509_cas.png|800px]]
|-
|-
| Chips || BM4P-510 || 3A, 3B, 3C, 3D || Ti || Image
| Chips || BM4P-510 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-510_cas.png|800px]]
|-
|-
| 2" || BM6P-006 || 2A, 2B, 2C, 2D, 2E, 2F || Al || [[image:BM6P-006_cas.png|800px]]
| 2" || BM6P-006 || 2A, 2B, 2C, 2D, 2E, 2F || Al || [[image:BM6P-006_cas.png|800px]]