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Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions

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| 2" || BM6P-502 || 2A, 2B, 2C, 2D, 2E, 2F || Ti || Example
| 2" || BM6P-502 || 2A, 2B, 2C, 2D, 2E, 2F || Ti || Example
|-
|-
| 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520_cas.png|600px]]
| 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520_cas.png|800px]]
|-
|-
| 4" || BM2P-011 || 4D, 4E || Al || [[image:BM2P-011_cas.png|600px]]
| 4" || BM2P-011 || 4D, 4E || Al || [[image:BM2P-011_cas.png|800px]]
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|-
| 6" || BW6-042 || 6A || Al || Image
| 6" || BW6-042 || 6A || Al || Image