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Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,179 edits
Line 31: Line 31:
! Wafer size !! ID !! Slot ID !! Material !! Image
! Wafer size !! ID !! Slot ID !! Material !! Image
|-
|-
| ? || Example || Example || Example || Example
| 2" || BM6P-006 || 2A, 2B, 2C, 2D, 2E, 2F || Al || Image
|-
| 2" || BM6P-502 || 2A, 2B, 2C, 2D, 2E, 2F || Ti || Example
|-
|-
| 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520.png|600px]]
| 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520.png|600px]]
|-
|-
| 4" || BM2P-011 || 4D, 4E || Al || Image
| 4" || BM2P-011 || 4D, 4E || Al || Image
|-
| 6" || BW6-042 || 6A || Al || Image
|-
| 8" || BSPCL-514 || 8A || Ti || Image
|}
|}


== Chip cassettes ==
== Chip cassettes ==
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