Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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! Wafer size !! ID !! Slot ID !! Material !! Image | ! Wafer size !! ID !! Slot ID !! Material !! Image | ||
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| 4" || BSPCL-520 || 4A, 4B, 4C || Ti || | | 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520.png|200px]] | ||
|- | |- | ||
| Example || Example || Example || Example || Example | | Example || Example || Example || Example || Example | ||