Jump to content

Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
Line 31: Line 31:
! Wafer size !! ID !! Slot ID !! Material !! Image
! Wafer size !! ID !! Slot ID !! Material !! Image
|-
|-
| 4" || BSPCL-520 || 4A, 4B, 4C || Ti ||  
| 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520.png|200px]]
|-
|-
| Example || Example || Example || Example || Example
| Example || Example || Example || Example || Example