Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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=JEOL 9500 cassette specifications page= | =JEOL 9500 cassette specifications page= | ||
== General information == | |||
Wafer cassettes are available for 2", 4", 6" and 8" wafers. Wafers must be intact, i.e. fractions of wafers can '''not''' be exposed in these cassettes. Cassettes dedicated chip exposure are also available. While cassettes are individually adapted to a specific substrate type they naturally share a set of features as illustrated below. | Wafer cassettes are available for 2", 4", 6" and 8" wafers. Wafers must be intact, i.e. fractions of wafers can '''not''' be exposed in these cassettes. Cassettes dedicated chip exposure are also available. While cassettes are individually adapted to a specific substrate type they naturally share a set of features as illustrated below. | ||
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== Coordinate system == | |||
When placing a substrate in a cassette it is essential to know the relation between the cassette coordinate system and the design coordinate system. On wafer cassettes this is very obvious as they have a flat pin where the flat of the wafer will sit. On chip cassettes the substrate can however be placed at any rotation and hence the exposed pattern can end up upside down if one does not pay attention to this. | |||
== Wafer cassettes == | == Wafer cassettes == | ||
== Chip cassettes == | == Chip cassettes == | ||