Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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Back side and front side view of cassette BSPCL-520. | |||
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Revision as of 14:57, 18 February 2023
JEOL 9500 cassette specifications page
Wafer cassettes are available for 2", 4", 6" and 8" wafers. Wafers must be intact, i.e. fractions of wafers can not be exposed in these cassettes. Cassettes dedicated chip exposure are also available.
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Back side and front side view of cassette BSPCL-520. |