Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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The system is fitted with an auto stocker system that can store 10 cassettes. It is thus possible to prepare multiple substrates and define an automated job to execute exposure of several substrates across several cassettes. After sample loading the cassette must be placed in the automatic cassette transfer system. Users are '''NOT''' allowed to do this. Only Nanolab staff who are members of the E-beam Loading Team may place cassettes into the automatic cassette transfer system. Hence users must always contact the Nanolab E-beam loading team prior to exposure to have their cassette loaded into the cassette transfer system. The E-beam loading team can be contacted at [email]. Upon loading a cassette Nanolab staff will visually verify the sample has been installed and secured correctly. Incorrect sample mounting can lead to severe damage to the internal parts of the JEOL 9500 exposure system. | The system is fitted with an auto stocker system that can store 10 cassettes. It is thus possible to prepare multiple substrates and define an automated job to execute exposure of several substrates across several cassettes. After sample loading the cassette must be placed in the automatic cassette transfer system. Users are '''NOT''' allowed to do this. Only Nanolab staff who are members of the E-beam Loading Team may place cassettes into the automatic cassette transfer system. Hence users must always contact the Nanolab E-beam loading team prior to exposure to have their cassette loaded into the cassette transfer system. The E-beam loading team can be contacted at [email]. Upon loading a cassette Nanolab staff will visually verify the sample has been installed and secured correctly. Incorrect sample mounting can lead to severe damage to the internal parts of the JEOL 9500 exposure system. | ||
'''Any user found to load cassettes to the cassette transfer system themselves will be permanently excluded from using the JEOL 9500 system.''' | '''Any user found to load cassettes to the cassette transfer system themselves will be permanently excluded from using the JEOL 9500 system.''' | ||
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Only Nanolab staff may load cassettes to the auto stocker. Users must ask the EBL Loading Team for help with this. Photo: Thomas Pedersen. | |||
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=Cassette transfer= | =Cassette transfer= | ||